Semiconductor device with contact plugs

A semiconductor device includes a semiconductor layer that has a first main surface at one side and a second main surface at another side, a plurality of gate electrodes that are arranged at intervals on the first main surface of the semiconductor layer, an interlayer insulating film that is formed...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Nagakura, So, Iwahashi, Satoshi
Format: Patent
Sprache:eng
Schlagworte:
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