System and method of measuring warpage of a workpiece on a noncontact support platform

Methods and systems for determination of warpage in a workpiece supported by a non-contact support platform, including a surface with a plurality of pressure ports and a plurality of fluid evacuation ports on the surface, a supply system with a pressure supply connected to the plurality of pressure...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Nishri, Boaz, Lautman, Ronen
Format: Patent
Sprache:eng
Schlagworte:
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