Vertical SiC MOSFET

A vertical SiC MOSFET having a source terminal, a drain terminal, and a gate region, as well as an epitaxial layer disposed between the source terminal and the drain terminal and having a doping of a first type, is furnished, a horizontally extending intermediate layer, which has regions having a do...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Feiler, Wolfgang, Jacke, Thomas
Format: Patent
Sprache:eng
Schlagworte:
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