Charged particle beam device

When using a charged particle beam aperture having a ring shape in a charged particle beam device, the charged particle beam with the highest current density immediately above the optical axis, among the charged particle beams is blocked, so that it is difficult to dispose the charged particle beam...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Nomaguchi, Tsunenori, Kato, Takeharu, Motomura, Shunichi, Kawasaki, Tadahiro, Yoshida, Ryuji
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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