Misregistration metrology by using fringe Moiré and optical Moiré effects
A metrology system and metrology methods are disclosed. The metrology system includes an illumination sub-system, a collection sub-system, a detector, and a controller. The controller is configured to receive an image of an overlay target on a sample, determine an apparent overlay between two workin...
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| creator | Gurevich, Evgeni Levinski, Vladimir Feler, Yoel Ghinovker, Mark Svizher, Alexander |
| description | A metrology system and metrology methods are disclosed. The metrology system includes an illumination sub-system, a collection sub-system, a detector, and a controller. The controller is configured to receive an image of an overlay target on a sample, determine an apparent overlay between two working zones along a measurement direction based on the image, and calculate an overlay between the two sample layers by dividing the apparent overlay by a Moiré gain to compensate for Moiré interference. |
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| subjects | CALCULATING COMPUTING COUNTING ELECTRIC COMMUNICATION TECHNIQUE ELECTRICITY IMAGE DATA PROCESSING OR GENERATION, IN GENERAL OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS PICTORIAL COMMUNICATION, e.g. TELEVISION |
| title | Misregistration metrology by using fringe Moiré and optical Moiré effects |
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