Substrate processing apparatus and substrate processing method

A recovery route returns, to a retaining tank, mixed solution supplied to a substrate processing unit. A discarding route discards the supplied mixed solution to a place other than the retaining tank. A switching controller causes the supplied mixed solution to flow into the discarding route during...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Umeno, Shinichi, Takaki, Yasuhiro, Higashijima, Jiro, Nagai, Takashi, Takamatsu, Yusuke, Morita, Hisashi, Ogata, Nobuhiro
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!