Substrate processing apparatus and substrate processing method

A recovery route returns, to a retaining tank, mixed solution supplied to a substrate processing unit. A discarding route discards the supplied mixed solution to a place other than the retaining tank. A switching controller causes the supplied mixed solution to flow into the discarding route during...

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Bibliographische Detailangaben
Hauptverfasser: Umeno, Shinichi, Takaki, Yasuhiro, Higashijima, Jiro, Nagai, Takashi, Takamatsu, Yusuke, Morita, Hisashi, Ogata, Nobuhiro
Format: Patent
Sprache:eng
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Zusammenfassung:A recovery route returns, to a retaining tank, mixed solution supplied to a substrate processing unit. A discarding route discards the supplied mixed solution to a place other than the retaining tank. A switching controller causes the supplied mixed solution to flow into the discarding route during a time interval until a first time interval has elapsed from a time point when the substrate processing unit starts to supply the mixed solution; causes the supplied mixed solution to flow into the recovery route during a time interval until a second time interval, which is decided based on a predetermined recovery rate, has elapsed after the first time interval elapses; and causes the supplied mixed solution to flow into the discarding route during a time interval until supply of the mixed solution has been ended from a time point when the second time interval elapses.