Optimizing an apparatus for multi-stage processing of product units

A method of optimizing an apparatus for multi-stage processing of product units such as wafers, the method includes: receiving object data representing one or more parameters measured across the product units and associated with different stages of processing of the product units; and determining fi...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Grouwstra, Cédric Désiré, Ypma, Alexander, Gkorou, Dimitra, Tsirogiannis, Georgios, Nije, Jelle, Spiering, Frans Reinier, Chen, Tzu-Chao, Roy, Sarathi, Van Wijk, Robert Jan
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!