Substrate holder for use in a lithographic apparatus

A substrate holder for use in a lithographic apparatus and configured to support a substrate, the substrate holder having a main body having a main body surface, a plurality of main burls projecting from the main body surface, wherein each main burl has a distal end surface configured to support the...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Roset, Niek Jacobus Johannes, Ravensbergen, Simon Karel, Timmermans, Roger Anton Marie, Kramer, Gijs, Baggen, Mark Constant Johannes, Vermeulen, Marcus Martinus Petrus Adrianus, Van Den Berkmortel, Frank Pieter Albert
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES
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