Storage apparatus for storing cassettes for substrates and processing apparatus equipped therewith

A storage apparatus to store cassettes for substrates comprising a moveable base plate constructed and arranged to hold cassettes, an outer wall provided with an opening to receive and remove the cassettes from the base plate, and a moving device constructed and arranged to move the base plate with...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Garssen, Adriaan, den Hartog-Besselink, Edwin
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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