Heat processing system

A heat processing system is disclosed. The heat processing system includes an enclosure, a heater, and a plurality of valves disposed on the enclosure. The heater is used to increase temperature within the enclosure. The plurality of valves have different sizes to uniformly and efficiently control t...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Lee, Eun-Joung, Choi, Chiku, Kim, Sung-Ki
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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