Prober

A prober includes: a stage that places a substrate formed with a plurality of chips thereon in a matrix; a contact that sequentially contacts with electrode pads of the plurality of chips thereby performing an inspection on electrical characteristic of the plurality of chips; a plurality of LED unit...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: Kasai, Shigeru
Format: Patent
Sprache:eng
Schlagworte:
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