Gas sensor device
An object of the present invention is to provide a gas sensor device capable of detecting a temporal change with high accuracy and maintaining measurement accuracy over a long period under a temperature environment susceptible to a complicated and wide range of change.The gas sensor device includes:...
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| creator | Matsumoto, Masahiro Onose, Yasuo Hoshika, Hiroaki Nakano, Hiroshi |
| description | An object of the present invention is to provide a gas sensor device capable of detecting a temporal change with high accuracy and maintaining measurement accuracy over a long period under a temperature environment susceptible to a complicated and wide range of change.The gas sensor device includes: heat insulating films 8a and 8b formed on a substrate 2; a first heater 3 provided on the heat insulating films 8a and 8b and configured to measure physical quantity of gas; and a reference resistor 4 formed in a resistive layer same as the first heater and formed on the heat insulating films 8a and 8b. The gas sensor device further includes a second heater 5 that simultaneously heats the first heater 3 and the reference resistor 4. |
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The gas sensor device further includes a second heater 5 that simultaneously heats the first heater 3 and the reference resistor 4.</description><language>eng</language><subject>INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES ; MEASURING ; MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUIDLEVEL ; METERING BY VOLUME ; PHYSICS ; TESTING</subject><creationdate>2021</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20210831&DB=EPODOC&CC=US&NR=11105757B2$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25543,76293</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20210831&DB=EPODOC&CC=US&NR=11105757B2$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>Matsumoto, Masahiro</creatorcontrib><creatorcontrib>Onose, Yasuo</creatorcontrib><creatorcontrib>Hoshika, Hiroaki</creatorcontrib><creatorcontrib>Nakano, Hiroshi</creatorcontrib><title>Gas sensor device</title><description>An object of the present invention is to provide a gas sensor device capable of detecting a temporal change with high accuracy and maintaining measurement accuracy over a long period under a temperature environment susceptible to a complicated and wide range of change.The gas sensor device includes: heat insulating films 8a and 8b formed on a substrate 2; a first heater 3 provided on the heat insulating films 8a and 8b and configured to measure physical quantity of gas; and a reference resistor 4 formed in a resistive layer same as the first heater and formed on the heat insulating films 8a and 8b. 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| language | eng |
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| subjects | INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUIDLEVEL METERING BY VOLUME PHYSICS TESTING |
| title | Gas sensor device |
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