Inspection apparatus, inspection method, computer program and recording medium

An inspecting device is provided with: a radiating unit which radiates terahertz waves onto a sample laminated into a plurality of layers; a detecting unit which acquires a detected waveform by detecting terahertz waves from the sample; a selecting unit which selects a portion of a library represent...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Ochiai, Takanori, Ogasawara, Masakazu
Format:	Patent
Sprache:	eng
Schlagworte:	MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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