Creating ion energy distribution functions (IEDF)

Systems and methods for creating arbitrarily-shaped ion energy distribution functions using shaped-pulse-bias. In an embodiment, a method includes applying a positive jump voltage to an electrode of a process chamber to neutralize a wafer surface, applying a negative jump voltage to the electrode to...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Rogers, James, Joubert, Olivier, Luere, Olivier, Koh, Travis, Dorf, Leonid, Dhindsa, Rajinder, Kraus, Philip A
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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