Transparent wafer center finder

A method and apparatus for locating the center of a substrate are provided. The substrate-positioning system uses an array of visible light sources to illuminate the substrate and its edges. The light sources are non-laser in nature and typically emit in the visible spectrum. The light sources are t...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	Schauer, Ronald Vern
Format:	Patent
Sprache:	eng
Schlagworte:	CALCULATING COMPUTING COUNTING IMAGE DATA PROCESSING OR GENERATION, IN GENERAL PHYSICS
Online-Zugang:	Volltext bestellen
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