Method for fabricating superconducting devices using a focused ion beam

Nano-scale junctions, wires, and junction arrays are created by using a focused high-energy ion beam to direct-write insulating or poorly conducting barriers into thin films of materials that are sensitive to disorder, including superconductors, ferromagnetic materials and semiconductors.

Bibliographische Detailangaben

Hauptverfasser:	Cho, Ethan Y, Dynes, Robert C, Wong, Travis J, Cybart, Shane A
Format:	Patent
Sprache:	eng
Schlagworte:	ELECTRICITY MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS TESTING
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