Methods for film modification

A method of converting films is disclosed. A method of modifying films is also disclosed. Some methods advantageously convert films from a first elemental composition to a second elemental composition. Some methods advantageously modify film properties without modifying film composition.

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Hauptverfasser: Tannos, Jethro, Mattson, Matthew August, Chen, Erica, Citla, Bhargav S, Ying, Chentsau Chris
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Sprache:eng
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creator Tannos, Jethro
Mattson, Matthew August
Chen, Erica
Citla, Bhargav S
Ying, Chentsau Chris
description A method of converting films is disclosed. A method of modifying films is also disclosed. Some methods advantageously convert films from a first elemental composition to a second elemental composition. Some methods advantageously modify film properties without modifying film composition.
format Patent
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title Methods for film modification
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