Tunable Fabry-Perot filter element, spectrometer device and method for manufacturing a tunable Fabry-Perot filter element

A tunable Fabry-Perot (FP) filter element includes a first FP filter stack arranged at a movable first carrier element, and a second FP filter stack arranged in an opposing configuration to the first FP filter stack at a second carrier element, wherein, upon an actuation, the first carrier element w...

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Bibliographische Detailangaben
1. Verfasser: Kautzsch, Thoralf
Format: Patent
Sprache:eng
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