Tunable Fabry-Perot filter element, spectrometer device and method for manufacturing a tunable Fabry-Perot filter element

A tunable Fabry-Perot (FP) filter element includes a first FP filter stack arranged at a movable first carrier element, and a second FP filter stack arranged in an opposing configuration to the first FP filter stack at a second carrier element, wherein, upon an actuation, the first carrier element w...

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1. Verfasser:	Kautzsch, Thoralf
Format:	Patent
Sprache:	eng
Schlagworte:	COLORIMETRY MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT MEASURING OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS RADIATION PYROMETRY TESTING
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creator	Kautzsch, Thoralf
description	A tunable Fabry-Perot (FP) filter element includes a first FP filter stack arranged at a movable first carrier element, and a second FP filter stack arranged in an opposing configuration to the first FP filter stack at a second carrier element, wherein, upon an actuation, the first carrier element with the first FP filter stack is vertically movable with respect to the second carrier element with the second FP filter stack, for adjusting the distance between the first and second opposing FP filter stack and wherein the movable first carrier element is formed as an SON structure (SON=silicon-on-nothing) in an SON substrate, wherein the SON structure is movable suspended by means of a mechanical spring element to the SON substrate.
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subjects	COLORIMETRY MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT MEASURING OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS RADIATION PYROMETRY TESTING
title	Tunable Fabry-Perot filter element, spectrometer device and method for manufacturing a tunable Fabry-Perot filter element
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