Acidic aqueous composition for electrolytic copper plating

The present invention relates to an acidic aqueous composition (plating bath) for electrolytic copper plating (electrolytic deposition of copper), the composition comprising(i) copper (II) ions,(ii) one or more than one compound of Formula (Ia)(iii) one, two, three or more than three further compoun...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Palm, Jens, Bolton, Onas, Schmidt, Ralf, Rohde, Dirk, Mann, Olivier, Llavona-Serrano, Angela, Von Horsten, Frank, Jha, Himendra, Si, Kun, Gaida, Josef
Format: Patent
Sprache:eng
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