Acidic aqueous composition for electrolytic copper plating

The present invention relates to an acidic aqueous composition (plating bath) for electrolytic copper plating (electrolytic deposition of copper), the composition comprising(i) copper (II) ions,(ii) one or more than one compound of Formula (Ia)(iii) one, two, three or more than three further compoun...

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Hauptverfasser: Palm, Jens, Bolton, Onas, Schmidt, Ralf, Rohde, Dirk, Mann, Olivier, Llavona-Serrano, Angela, Von Horsten, Frank, Jha, Himendra, Si, Kun, Gaida, Josef
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creator Palm, Jens
Bolton, Onas
Schmidt, Ralf
Rohde, Dirk
Mann, Olivier
Llavona-Serrano, Angela
Von Horsten, Frank
Jha, Himendra
Si, Kun
Gaida, Josef
description The present invention relates to an acidic aqueous composition (plating bath) for electrolytic copper plating (electrolytic deposition of copper), the composition comprising(i) copper (II) ions,(ii) one or more than one compound of Formula (Ia)(iii) one, two, three or more than three further compounds, which are different from the compound of Formula (Ia),with the definitions given below, the use of the acidic aqueous composition according to the invention for electrolytic copper plating, the use of the compound of Formula (Ia) in an acidic aqueous composition for electrolytic metal plating, a method of electrolytic copper plating using the acidic aqueous composition according to the invention, and specific compounds derived from Formula (Ia) for an acidic aqueous composition for electrolytic metal plating.
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subjects APPARATUS THEREFOR
CHEMISTRY
ELECTROFORMING
ELECTROLYTIC OR ELECTROPHORETIC PROCESSES
METALLURGY
PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTIONOF COATINGS
title Acidic aqueous composition for electrolytic copper plating
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