Scanning efficiency by individual beam steering of multi-beam apparatus

Systems and methods of observing a sample in a multi-beam apparatus are disclosed. A multi-beam apparatus may comprise an array of deflectors configured to steer individual beamlets of multiple beamlets, each deflector of the array of deflectors having a corresponding driver configured to receive a...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	Van Der Toorn, Jan-Gerard Cornelis
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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