Semiconductor device having a flat region with an outer peripheral shape including chamfer portions

Semiconductor device having a flat region with an outer peripheral shape including chamfer portions

Provided is a semiconductor device capable of improving relative accuracy of semiconductor elements and a yield of a semiconductor integrated circuit device. The semiconductor device includes a flat region formed on a surface of a semiconductor substrate, and having an outer peripheral shape formed...

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1. Verfasser: Takasu, Hiroaki
Format: Patent
Sprache:eng
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BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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description Provided is a semiconductor device capable of improving relative accuracy of semiconductor elements and a yield of a semiconductor integrated circuit device. The semiconductor device includes a flat region formed on a surface of a semiconductor substrate, and having an outer peripheral shape formed by regional sides and regional chamfer portions; an outer peripheral region surrounding the flat region, and having a uniform height different from a height of the flat region; a plurality of semiconductor elements having similar shapes or the same shape, and formed on the flat region; and a wiring metal connecting the plurality of semiconductor elements via contact holes formed in a second insulating film on the semiconductor elements.
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title Semiconductor device having a flat region with an outer peripheral shape including chamfer portions
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