Airborne molecular contamination filter cartridge system with combustible filter cartridge and reusable frame

Filters for semiconductor tool and clean room applications to control airborne molecular contamination. The filter cartridge system includes a filter cartridge having a non-woven fiber and at least one adsorbent. In some embodiments, the filter cartridge is constructed of substantially combustible m...

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Bibliographische Detailangaben

Hauptverfasser:	Wildgoose, Joe, Warniers, Evan, Venet, Marc, Leblanc, Tom, Gaudreau, John
Format:	Patent
Sprache:	eng
Schlagworte:	PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL SEPARATION TRANSPORTING
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