Method of inspecting pattern defect

Provided is a method of inspecting a pattern defect. The method includes: applying a voltage to an object to be inspected and measuring an inspection signal generated in a pattern of the object to be inspected due to the voltage applied to the object to be inspected over time; generating an intensit...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Sohn, Young-Hoon, Jun, Chung-Sam, Yang, Yu-Sin
Format:	Patent
Sprache:	eng
Schlagworte:	MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS TESTING
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