Laser-releasable bonding materials for 3-D IC applications

Novel thermoplastic polyhydroxyether-based compositions for use as a laser-releasable composition for temporary bonding and laser debonding processes are provided. The inventive compositions can be debonded using various UV lasers, leaving behind little to no debris. The layers formed from these com...

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Hauptverfasser: Liu, Xiao, Puligadda, Rama, Bai, Dongshun, Wu, Qi, Huang, Baron
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creator Liu, Xiao
Puligadda, Rama
Bai, Dongshun
Wu, Qi
Huang, Baron
description Novel thermoplastic polyhydroxyether-based compositions for use as a laser-releasable composition for temporary bonding and laser debonding processes are provided. The inventive compositions can be debonded using various UV lasers, leaving behind little to no debris. The layers formed from these compositions possess good thermal stabilities and are soluble in commonly-used organic solvents (e.g., cyclopentanone). The compositions can also be used as build-up layers for RDL formation.
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fullrecord <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_US10968348B2</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>US10968348B2</sourcerecordid><originalsourceid>FETCH-epo_espacenet_US10968348B23</originalsourceid><addsrcrecordid>eNrjZLDySSxOLdItSs1JTSxOTMpJVUjKz0vJzEtXyE0sSS3KTMwpVkjLL1Iw1nVR8HRWSCwoyMlMTizJzM8r5mFgTQNKp_JCaW4GRTfXEGcP3dSC_PjU4oLE5NS81JL40GBDA0szC2MTCycjY2LUAAAmcy54</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>Laser-releasable bonding materials for 3-D IC applications</title><source>esp@cenet</source><creator>Liu, Xiao ; Puligadda, Rama ; Bai, Dongshun ; Wu, Qi ; Huang, Baron</creator><creatorcontrib>Liu, Xiao ; Puligadda, Rama ; Bai, Dongshun ; Wu, Qi ; Huang, Baron</creatorcontrib><description>Novel thermoplastic polyhydroxyether-based compositions for use as a laser-releasable composition for temporary bonding and laser debonding processes are provided. The inventive compositions can be debonded using various UV lasers, leaving behind little to no debris. The layers formed from these compositions possess good thermal stabilities and are soluble in commonly-used organic solvents (e.g., cyclopentanone). The compositions can also be used as build-up layers for RDL formation.</description><language>eng</language><subject>BASIC ELECTRIC ELEMENTS ; CHEMISTRY ; COMPOSITIONS BASED THEREON ; COMPOSITIONS OF MACROMOLECULAR COMPOUNDS ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; METALLURGY ; ORGANIC MACROMOLECULAR COMPOUNDS ; SEMICONDUCTOR DEVICES ; THEIR PREPARATION OR CHEMICAL WORKING-UP ; USE OF INORGANIC OR NON-MACROMOLECULAR ORGANIC SUBSTANCES ASCOMPOUNDING INGREDIENTS</subject><creationdate>2021</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20210406&amp;DB=EPODOC&amp;CC=US&amp;NR=10968348B2$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25563,76418</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20210406&amp;DB=EPODOC&amp;CC=US&amp;NR=10968348B2$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>Liu, Xiao</creatorcontrib><creatorcontrib>Puligadda, Rama</creatorcontrib><creatorcontrib>Bai, Dongshun</creatorcontrib><creatorcontrib>Wu, Qi</creatorcontrib><creatorcontrib>Huang, Baron</creatorcontrib><title>Laser-releasable bonding materials for 3-D IC applications</title><description>Novel thermoplastic polyhydroxyether-based compositions for use as a laser-releasable composition for temporary bonding and laser debonding processes are provided. The inventive compositions can be debonded using various UV lasers, leaving behind little to no debris. The layers formed from these compositions possess good thermal stabilities and are soluble in commonly-used organic solvents (e.g., cyclopentanone). The compositions can also be used as build-up layers for RDL formation.</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>CHEMISTRY</subject><subject>COMPOSITIONS BASED THEREON</subject><subject>COMPOSITIONS OF MACROMOLECULAR COMPOUNDS</subject><subject>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>METALLURGY</subject><subject>ORGANIC MACROMOLECULAR COMPOUNDS</subject><subject>SEMICONDUCTOR DEVICES</subject><subject>THEIR PREPARATION OR CHEMICAL WORKING-UP</subject><subject>USE OF INORGANIC OR NON-MACROMOLECULAR ORGANIC SUBSTANCES ASCOMPOUNDING INGREDIENTS</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2021</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZLDySSxOLdItSs1JTSxOTMpJVUjKz0vJzEtXyE0sSS3KTMwpVkjLL1Iw1nVR8HRWSCwoyMlMTizJzM8r5mFgTQNKp_JCaW4GRTfXEGcP3dSC_PjU4oLE5NS81JL40GBDA0szC2MTCycjY2LUAAAmcy54</recordid><startdate>20210406</startdate><enddate>20210406</enddate><creator>Liu, Xiao</creator><creator>Puligadda, Rama</creator><creator>Bai, Dongshun</creator><creator>Wu, Qi</creator><creator>Huang, Baron</creator><scope>EVB</scope></search><sort><creationdate>20210406</creationdate><title>Laser-releasable bonding materials for 3-D IC applications</title><author>Liu, Xiao ; Puligadda, Rama ; Bai, Dongshun ; Wu, Qi ; Huang, Baron</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_US10968348B23</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2021</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>CHEMISTRY</topic><topic>COMPOSITIONS BASED THEREON</topic><topic>COMPOSITIONS OF MACROMOLECULAR COMPOUNDS</topic><topic>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>METALLURGY</topic><topic>ORGANIC MACROMOLECULAR COMPOUNDS</topic><topic>SEMICONDUCTOR DEVICES</topic><topic>THEIR PREPARATION OR CHEMICAL WORKING-UP</topic><topic>USE OF INORGANIC OR NON-MACROMOLECULAR ORGANIC SUBSTANCES ASCOMPOUNDING INGREDIENTS</topic><toplevel>online_resources</toplevel><creatorcontrib>Liu, Xiao</creatorcontrib><creatorcontrib>Puligadda, Rama</creatorcontrib><creatorcontrib>Bai, Dongshun</creatorcontrib><creatorcontrib>Wu, Qi</creatorcontrib><creatorcontrib>Huang, Baron</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Liu, Xiao</au><au>Puligadda, Rama</au><au>Bai, Dongshun</au><au>Wu, Qi</au><au>Huang, Baron</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Laser-releasable bonding materials for 3-D IC applications</title><date>2021-04-06</date><risdate>2021</risdate><abstract>Novel thermoplastic polyhydroxyether-based compositions for use as a laser-releasable composition for temporary bonding and laser debonding processes are provided. The inventive compositions can be debonded using various UV lasers, leaving behind little to no debris. The layers formed from these compositions possess good thermal stabilities and are soluble in commonly-used organic solvents (e.g., cyclopentanone). The compositions can also be used as build-up layers for RDL formation.</abstract><oa>free_for_read</oa></addata></record>
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subjects BASIC ELECTRIC ELEMENTS
CHEMISTRY
COMPOSITIONS BASED THEREON
COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
METALLURGY
ORGANIC MACROMOLECULAR COMPOUNDS
SEMICONDUCTOR DEVICES
THEIR PREPARATION OR CHEMICAL WORKING-UP
USE OF INORGANIC OR NON-MACROMOLECULAR ORGANIC SUBSTANCES ASCOMPOUNDING INGREDIENTS
title Laser-releasable bonding materials for 3-D IC applications
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-08T08%3A42%3A13IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=Liu,%20Xiao&rft.date=2021-04-06&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3EUS10968348B2%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true