Electron gun and electron microscope

An electron gun for an electron microscope or similar device includes a field emitter cathode having a field emitter protrusion extending from the output surface of a monocrystalline silicon substrate, and electrodes configured to enhance the emission of electrons from a tip portion of the field emi...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Garcia Berrios, Edgardo, Xiao-Li, Yinying, Fielden, John, Chuang, Yung-Ho Alex, Nagao, Masayoshi
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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