Processing apparatus

A processing apparatus includes: a holding unit that holds a workpiece; a processing mechanism that processes the workpiece held by the holding unit; a processing liquid supplying mechanism that supplies a processing liquid containing an oxidizing agent to at least the workpiece held by the holding...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: Takenouchi, Kenji
Format: Patent
Sprache:eng
Schlagworte:
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