System and method for drying and analytical testing of containers

Embodiments of the present invention provide a system and method to perform drying and testing of organometallic and organosilane precursor source ampoules that have been cleaned for re-use. The drying and quality control testing is performed in a single location with a single apparatus requiring on...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	McDermott, Wayne Thomas, Pingitore, Michael Altschul, Siemer, Joseph J, Bernard, Matthew David, Hopkins, Allison Barbeau
Format:	Patent
Sprache:	eng
Schlagworte:	BLASTING DRYING DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM HEATING INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES LIGHTING MEASURING MECHANICAL ENGINEERING PHYSICS TESTING WEAPONS
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Beschreibung
Zusammenfassung:	Embodiments of the present invention provide a system and method to perform drying and testing of organometallic and organosilane precursor source ampoules that have been cleaned for re-use. The drying and quality control testing is performed in a single location with a single apparatus requiring only one manual connection/disconnection step of the ampoule to the apparatus. The testing includes analyses for residual moisture, entrained particulate matter, differential pressure, and helium leak checking.