Packaging a sealed cavity in an electronic device

An electronic device includes a package substrate, a circuit assembly, and a housing. The circuit assembly is mounted on the package substrate. The circuit assembly includes a first sealed cavity formed in a device substrate. The housing is mounted on the package substrate to form a second sealed ca...

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Hauptverfasser: Jacobs, Simon Joshua, Fruehling, Adam Joseph, Cook, Benjamin Stassen, Herbsommer, Juan Alejandro, Hallas, James F, Long, Randy
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creator Jacobs, Simon Joshua
Fruehling, Adam Joseph
Cook, Benjamin Stassen
Herbsommer, Juan Alejandro
Hallas, James F
Long, Randy
description An electronic device includes a package substrate, a circuit assembly, and a housing. The circuit assembly is mounted on the package substrate. The circuit assembly includes a first sealed cavity formed in a device substrate. The housing is mounted on the package substrate to form a second sealed cavity about the circuit assembly.
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recordid cdi_epo_espacenet_US10913654B2
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subjects AUTOMATIC CONTROL, STARTING, SYNCHRONISATION, OR STABILISATIONOF GENERATORS OF ELECTRONIC OSCILLATIONS OR PULSES
BASIC ELECTRONIC CIRCUITRY
ELECTRICITY
HOROLOGY
MEASURING
MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE
MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES
MICROSTRUCTURAL TECHNOLOGY
PERFORMING OPERATIONS
PHYSICS
TESTING
TESTING STATIC OR DYNAMIC BALANCE OF MACHINES ORSTRUCTURES
TESTING STRUCTURES OR APPARATUS NOT OTHERWISE PROVIDED FOR
TIME-INTERVAL MEASURING
TRANSPORTING
title Packaging a sealed cavity in an electronic device
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