Feeding process of chlorine fluoride

The feeding process of chlorine fluoride of this invention is a feeding process to feed chlorine fluoride generated by loading a gas that contains fluorine atoms and a gas that contains chlorine atoms to a flow-type heat reactor or a plasma reactor, and it can stably generate and safely feed chlorin...

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Bibliographische Detailangaben
Hauptverfasser:	Kato, Korehito, Kikuchi, Sho, Shibusawa, Yukinobu, Kawaguchi, Shinichi, Sakurai, Yoshimasa, Iketani, Yoshihiko, Takahashi, Yoshinao, Takizawa, Hiroki
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS THEREFOR BASIC ELECTRIC ELEMENTS CHEMISTRY CLEANING CLEANING IN GENERAL COMPOUNDS THEREOF ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY GENERAL METHODS OF ORGANIC CHEMISTRY INORGANIC CHEMISTRY METALLURGY NON-METALLIC ELEMENTS ORGANIC CHEMISTRY PERFORMING OPERATIONS PREVENTION OF FOULING IN GENERAL SEMICONDUCTOR DEVICES TRANSPORTING
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