Beam irradiation device

The present disclosure aims at proposing a multi-beam irradiation device capable of correcting off-axis aberrations. In order to achieve the above object, a beam irradiation device is proposed, which includes a beam source which emits a plurality of beams; an objective lens (17) which focuses a beam...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Suzuki, Naomasa, Ebizuka, Yasushi, Kawamoto, Yuta, Yano, Manabu, Ban, Naoma, Ikegami, Akira
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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