Method and device for determining the position of an optical boundary surface along a first direction

Method and device for determining the position of an optical boundary surface along a first direction

A method for determining the position of an optical boundary surface along a first direction includes a) imaging a pattern in a plane transverse to the first direction, and recording a two-dimensional image of the pattern imaged in the plane; b) repeating step a) for different positions in the first...

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1. Verfasser: Schaefer, Lutz
Format: Patent
Sprache:eng
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CALCULATING
COMPUTING
COUNTING
IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
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description A method for determining the position of an optical boundary surface along a first direction includes a) imaging a pattern in a plane transverse to the first direction, and recording a two-dimensional image of the pattern imaged in the plane; b) repeating step a) for different positions in the first direction, wherein the different positions cover an area in the first direction in which the optical boundary surface lies; c) averaging each image from step a) along a direction transverse to the second direction such that in each case a one-dimensional data set is produced; d) transforming each data set from step c) into a frequency domain; e) determining the frequency of the greatest amplitude of all data sets transformed in step d); and f) determining the position along the first direction by evaluating the data sets transformed in step d) at the frequency determined in step e).
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subjects CALCULATING
COMPUTING
COUNTING
IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
title Method and device for determining the position of an optical boundary surface along a first direction
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