High-speed metrology

A method and an apparatus are directed to characterizing a continuously moving 3D object via interferometry-based scanning. The method includes repeatedly forming several depth characterizations of the 3D object along respective scan lines of a plurality of scan lines on the surface of the 3D object...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Zengerle, III, Walter H, Weber, Aaron, Matusik, Wojciech, Vidimce, Kiril, Chen, Desai
Format: Patent
Sprache:eng
Schlagworte:
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