Film bulk acoustic wave resonator (FBAR) having stress-relief

An acoustic resonator structure comprises: a substrate comprising a cavity having a plurality of sides; a first electrode disposed over the cavity; a first connection portion that connects to the first electrode over only one side of the plurality of sides of the cavity; a piezoelectric layer dispos...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Ruby, Richard C, Sridaran, Suresh
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRONIC CIRCUITRY ELECTRICITY IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS RESONATORS
Online-Zugang:	Volltext bestellen
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