Semiconductor device

A semiconductor device includes a plurality of lower electrodes repeatedly arranged at a first pitch in a first direction and a second direction crossing the first direction at an acute angle on a substrate, and a support pattern in contact with sidewalls of the plurality of lower electrodes and sup...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	Sohn, Wan Gi
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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