Visualization of three-dimensional semiconductor structures

A semiconductor metrology tool inspects an area of a semiconductor wafer. The inspected area includes a plurality of instances of a 3D semiconductor structure arranged periodically in at least one dimension. A computer system generates a model of a respective instance of the 3D semiconductor structu...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Veldman, Andrei, Chouaib, Houssam, Xu, Yin, Dziura, Thaddeus G, Hench, John, Gellineau, Antonio, Gunde, Abhi, Iloreta, Jonathan, Xu, Kaiwen, Lee, Liequan, Rosenberg, Aaron J
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CALCULATING COMPUTING COUNTING ELECTRIC DIGITAL DATA PROCESSING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY IMAGE DATA PROCESSING OR GENERATION, IN GENERAL INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS SEMICONDUCTOR DEVICES TESTING
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