Oriented piezoelectric film and method of manufacturing same, and liquid ejection head

Provided is use of an oriented piezoelectric film including of a perovskite-type crystal represented by the following general formula (1): Ba1-xCaxTi1-yZryO3 (0≤x≤0.2, 0≤y≤0.2) (1). The oriented piezoelectric film is formed on an oriented underlayer oriented in a (111) plane and contains first cryst...

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Hauptverfasser: Kobayashi, Motokazu, Kotani, Yoshinori, Shimizu, Chiemi, Uchida, Fumio, Ohashi, Yoshihiro
Format: Patent
Sprache:eng
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