Bonded semiconductor structures having bonding contacts made of indiffusible conductive materials and methods for forming the same

Embodiments of bonded semiconductor structures and fabrication methods thereof are disclosed. In an example, a semiconductor device includes a first semiconductor structure, a second semiconductor structure, and a bonding interface between the first semiconductor structure and the second semiconduct...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Liu, Jun, Hua, Zi Qun, Huo, Zongliang, Zhu, Jifeng, Chen, Jun, Xiao, Li Hong
Format: Patent
Sprache:eng
Schlagworte:
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