Charged particle beam device and capturing condition adjusting method in charged particle beam device

A charged particle beam device includes an electron source which generates an electron beam, an objective lens which is applied with a coil current to converge the electron beam on a sample, a control unit which controls the current to be applied to the objective lens, a hysteresis characteristic st...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Yokosuka, Toshiyuki, Nakano, Tomohito, Sasaki, Yuko, Mochizuki, Yuzuru, Yamazaki, Minoru
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!