Method of electroplating metal into recessed feature and electroplating layer in recessed feature

A method of electroplating a metal into a recessed feature is provided, which includes: contacting a surface of the recessed feature with an electroplating solution comprising metal ions, an accelerator additive, a suppressor additive and a leveler additive, in which the recessed feature has at leas...

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Bibliographische Detailangaben

Hauptverfasser:	Jangjian, Shiu-Ko, Nian, Jun-Nan, Wang, Yu-Sheng, Peng, Yu-Ren, Hung, Chi-Cheng, Wu, Jyun-Ru
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS THEREFOR BASIC ELECTRIC ELEMENTS CHEMISTRY CONVERSION OR DISTRIBUTION OF ELECTRIC POWER CURRENT COLLECTORS ELECTRICITY ELECTROFORMING ELECTROLYTIC OR ELECTROPHORETIC PROCESSES GENERATION INSTALLATION OF ELECTRIC CABLES OR LINES, OR OF COMBINEDOPTICAL AND ELECTRIC CABLES OR LINES LINE CONNECTORS METALLURGY PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTIONOF COATINGS
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