Method for accelerated high-resolution scanning microscopy

In a method for high-resolution scanning microscopy of a sample, provision is made of focusing of illumination radiation into an illumination spot in or on the sample and stimulating the emission of detection radiation at a sample spot that coincides with the illumination spot. The sample spot is im...

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description In a method for high-resolution scanning microscopy of a sample, provision is made of focusing of illumination radiation into an illumination spot in or on the sample and stimulating the emission of detection radiation at a sample spot that coincides with the illumination spot. The sample spot is imaged into an image that is static on a spatially resolving surface detector having pixels of a size that spatially resolve the image, wherein the imaging has a an optical imaging resolution limit. The entire sample is captured by performing a scanning movement of the illumination spot and of the coinciding sample spot over the sample in a scanning operation. An image of the sample having a resolution that is increased beyond the optical imaging resolution limit of the imaging is produced from the data of the pixels for each scanning position.
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subjects CALCULATING
COMPUTING
COUNTING
IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
TESTING
title Method for accelerated high-resolution scanning microscopy
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