Width-wise segmented slot contacts for improving performance in phase-change material (PCM) radio frequency (RF) switches

A radio frequency (RF) switch includes a phase-change material (PCM) and a heating element underlying an active segment of the PCM, the PCM and heating element being situated over a substrate. A contact dielectric is over the PCM. PCM contacts have upper portions and uniform plate slot lower portion...

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Bibliographische Detailangaben

Hauptverfasser:	Howard, David J, El-Hinnawy, Nabil, Slovin, Gregory P, Rose, Jefferson E, DeBar, Michael J
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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