Modulated air surface particle detector

A device for counting particles on a sample surface includes a scanner probe having a first opening for receiving particles from a sample surface and one or more second openings, a particle detector for detecting particles passed there-through, a modulator for modulating air flowing there-through, a...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Alston, William W, Browne, David, Lutz, Don
Format:	Patent
Sprache:	eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
Online-Zugang:	Volltext bestellen
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