Modulated air surface particle detector

Modulated air surface particle detector

A device for counting particles on a sample surface includes a scanner probe having a first opening for receiving particles from a sample surface and one or more second openings, a particle detector for detecting particles passed there-through, a modulator for modulating air flowing there-through, a...

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Hauptverfasser: Alston, William W, Browne, David, Lutz, Don
Format: Patent
Sprache:eng
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INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
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creator Alston, William W
Browne, David
Lutz, Don
description A device for counting particles on a sample surface includes a scanner probe having a first opening for receiving particles from a sample surface and one or more second openings, a particle detector for detecting particles passed there-through, a modulator for modulating air flowing there-through, a pump for producing a first airstream flowing from the first opening and through the particle detector, and for producing a second airstream flowing through the modulator and to the one or more second openings, and control circuitry for controlling the modulator to modulate an amplitude of the second airstream.
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subjects INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
title Modulated air surface particle detector
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