Gas sensor device, and heating current control method for gas sensor device
The purpose of the present invention is to provide a gas sensor device with which highly accurate measurement performance can be achieved even if there are changes in the environmental temperature. The present invention is provided with: a detection heater (3) formed in a thin film part; a temperatu...
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| creator | Matsumoto, Masahiro Onose, Yasuo Nakano, Hiroshi |
| description | The purpose of the present invention is to provide a gas sensor device with which highly accurate measurement performance can be achieved even if there are changes in the environmental temperature. The present invention is provided with: a detection heater (3) formed in a thin film part; a temperature compensation heater (4) formed so as to surround the detection heater; a detection heater heating control circuit for controlling the heating temperature of the detection heater (3); and a temperature compensation heater heating control circuit for controlling the heating temperature of the temperature compensation heater to a heating temperature lower than the heating temperature of the detection heater. The detection heater heating control circuit and the temperature compensation heater heating control circuit adjust the respective heating currents in response to an increase in the temperature of a substrate, so as to reduce the temperature difference between the heating temperature of the detection heater (3) and the heating temperature of the temperature compensation heater (4). |
| format | Patent |
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The present invention is provided with: a detection heater (3) formed in a thin film part; a temperature compensation heater (4) formed so as to surround the detection heater; a detection heater heating control circuit for controlling the heating temperature of the detection heater (3); and a temperature compensation heater heating control circuit for controlling the heating temperature of the temperature compensation heater to a heating temperature lower than the heating temperature of the detection heater. 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The present invention is provided with: a detection heater (3) formed in a thin film part; a temperature compensation heater (4) formed so as to surround the detection heater; a detection heater heating control circuit for controlling the heating temperature of the detection heater (3); and a temperature compensation heater heating control circuit for controlling the heating temperature of the temperature compensation heater to a heating temperature lower than the heating temperature of the detection heater. 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The present invention is provided with: a detection heater (3) formed in a thin film part; a temperature compensation heater (4) formed so as to surround the detection heater; a detection heater heating control circuit for controlling the heating temperature of the detection heater (3); and a temperature compensation heater heating control circuit for controlling the heating temperature of the temperature compensation heater to a heating temperature lower than the heating temperature of the detection heater. The detection heater heating control circuit and the temperature compensation heater heating control circuit adjust the respective heating currents in response to an increase in the temperature of a substrate, so as to reduce the temperature difference between the heating temperature of the detection heater (3) and the heating temperature of the temperature compensation heater (4).</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING |
| title | Gas sensor device, and heating current control method for gas sensor device |
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