Overlay error measurement device and computer program

The purpose of the present invention is to provide an overlay error measurement device that is capable of accurately recognizing patterns and executing overlay error measurement, even when one pattern overlaps with another pattern in some areas but not in others. In order to do so, the present inven...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: Fukunaga, Fumihiko
Format: Patent
Sprache:eng
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