Techniques for forming spin-transfer torque memory having a dot-contacted free magnetic layer

Techniques are disclosed for fabricating a self-aligned spin-transfer torque memory (STTM) device with a dot-contacted free magnetic layer. In some embodiments, the disclosed STTM device includes a first dielectric spacer covering sidewalls of an electrically conductive hardmask layer that is patter...

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Hauptverfasser: Doczy, Mark L, Doyle, Brian S, Kuo, Charles C, Kencke, David L, Chau, Robert S, Oguz, Kaan, Suri, Satyarth
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creator Doczy, Mark L
Doyle, Brian S
Kuo, Charles C
Kencke, David L
Chau, Robert S
Oguz, Kaan
Suri, Satyarth
description Techniques are disclosed for fabricating a self-aligned spin-transfer torque memory (STTM) device with a dot-contacted free magnetic layer. In some embodiments, the disclosed STTM device includes a first dielectric spacer covering sidewalls of an electrically conductive hardmask layer that is patterned to provide an electronic contact for the STTM's free magnetic layer. The hardmask contact can be narrower than the free magnetic layer. The first dielectric spacer can be utilized in patterning the STTM's fixed magnetic layer. In some embodiments, the STTM further includes an optional second dielectric spacer covering sidewalls of its free magnetic layer. The second dielectric spacer can be utilized in patterning the STTM's fixed magnetic layer and may serve, at least in part, to protect the sidewalls of the free magnetic layer from redepositing of etch byproducts during such patterning, thereby preventing electrical shorting between the fixed magnetic layer and the free magnetic layer.
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INFORMATION STORAGE
PHYSICS
STATIC STORES
title Techniques for forming spin-transfer torque memory having a dot-contacted free magnetic layer
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