Fluid control device and flow rate ratio control device

A fluid control device is adapted to include: a valve provided in a flow path through which a fluid flows; a pressure sensor provided upstream of the valve; a flow rate sensor provided on downstream of the pressure sensor; a set flow rate generator that outputs a set flow rate corresponding to the m...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Kanamaru, Yusuke, Tanaka, Yuki, Nakagawa, Emiko, Takijiri, Kotaro
Format: Patent
Sprache:eng
Schlagworte:
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